Power Processing Circuits for Mems Inertial Energy Scavengers

Abstract: Inertial energy scavengers are self-contained devices which generate power from ambient motion, by electrically damping the internal motion of a suspended proof mass. There are significant challenges in converting the power generated from such devices to useable form, particularly in micro-engineered variants. This paper presents approaches to this power conversion requirement, with emphasis on the cases of electromagnetic and electrostatic transduction.