Validation of compact models of microcantilever actuators for RF-MEMS application

Abstract: Microcantilever specimens for in-plane and out-ofplane bending tests are here analyzed. Experimental validation of 2D and 3D numerical models is performed. Main features of in-plane and out-of-plane layouts are then discussed. Effectiveness of plane models to predict pull-in in presence of geometric nonlinearity due to a large tip displacement and initial curvature of microbeam is investigated. The paper is aimed to discuss the capability of 2D models to be used as compact tools to substitute some model order reduction techniques, which appear unsuitable in presence of both electromechanical and geometric nonlinearities.