Comparison of different sources for laboratory X-ray microscopy

Abstract: This paper describes the setup of two different solutions for laboratory X-ray microscopy working with geometric magnification. One setup uses thin-film transmission targets with an optimized tungsten-layer thickness and the electron gun and optics of an electron probe micro analyzer to generate a very small X-ray source. The other setup is based on a scanning electron microscope and uses microstructured reflection targets. We also describe the structuring process for these targets. In both cases we show that resolutions of 100 nm can be achieved. Also the possibilities of computed tomography for 3D imaging are explored and we show first imaging examples of high-absorption as well as low-absorption specimens to demonstrate the capabilities of the setups.