On-chip generation, routing and detection of quantum light

Abstract: Semiconductor based photonic information technologies are rapidly being pushed to the quantum limit where non-classical states of light can be generated, manipulated and exploited in prototypical quantum optical circuits. Here, we report the on-chip generation of quantum light from individual, resonantly excited self-assembled InGaAs quantum dots, efficient routing over length scales $\geq 1$ mm via GaAs ridge waveguides and in-situ detection using evanescently coupled integrated NbN superconducting single photon detectors fabricated on the same chip. By temporally filtering the time-resolved luminescence signal stemming from single, resonantly excited quantum dots we use the prototypical quantum optical circuit to perform time-resolved excitation spectroscopy on single dots and demonstrate resonant fluorescence with a line-width of $10 \pm 1 \ \mu$eV; key elements needed for the use of single photons in prototypical quantum photonic circuits.