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hp-finite element method for simulating light scattering from complex 3D structures

Published 23 Mar 2015 in physics.optics and physics.comp-ph | (1503.06617v1)

Abstract: Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.

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