Systematic efficiency study of line-doubled zone plates

Published 8 May 2017 in cond-mat.mtrl-sci | (1705.02807v1)

Abstract: Line-doubled Fresnel zone plates provide nanoscale, high aspect ratio structures required for efficient high resolution imaging in the multi-keV x-ray range. For the fabrication of such optics a high aspect ratio HSQ resist template is produced by electron-beam lithography and then covered with Ir by atomic layer deposition (ALD).

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