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A rhombohedral ferroelectric phase in epitaxially-strained Hf0.5Zr0.5O2 thin films

Published 26 Jan 2018 in cond-mat.mtrl-sci | (1801.09008v1)

Abstract: After decades of searching for robust nanoscale ferroelectricity that could enable integration into the next generation memory and logic devices, hafnia-based thin films have appeared as the ultimate candidate because their ferroelectric (FE) polarization becomes more robust as the size is reduced. This exposes a new kind of ferroelectricity, whose mechanism still needs to be understood. Towards this end, thin films with increased crystal quality are needed. We report the epitaxial growth of Hf0.5Zr0.5O2 (HZO) thin films on (001)-oriented La0.7Sr0.3MnO3/SrTiO3 (STO) substrates. The films, which are under epitaxial compressive strain and are predominantly (111)-oriented, display large FE polarization values up to 34 {\mu}C/cm2 and do not need wake-up cycling. Structural characterization reveals a rhombohedral phase, different from the commonly reported polar orthorhombic phase. This unexpected finding allows us to propose a compelling model for the formation of the FE phase. In addition, these results point towards nanoparticles of simple oxides as a vastly unexplored class of nanoscale ferroelectrics.

Citations (375)

Summary

  • The paper reveals a previously unidentified rhombohedral ferroelectric phase in epitaxially-strained Hf0.5Zr0.5O2 films, attaining polarization values up to 34 µC/cm² without wake-up cycling.
  • It employs pulsed laser deposition alongside XRD and TEM analyses to confirm (111)-oriented films stabilized by compressive strain.
  • The study integrates first-principles simulations to elucidate phase stabilization mechanisms, paving the way for advanced ferroelectric device integration.

Analysis of a Rhombohedral Ferroelectric Phase in Epitaxially-Strained HfZrO Thin Films

The paper under scrutiny presents a comprehensive study of epitaxially-strained Hafnium Zirconium Oxide (HfZrO) thin films, emphasizing the discovery of a rhombohedral ferroelectric phase. This discovery is significant in the context of nanoscale ferroelectric materials, which are pivotal for the advancement of memory and logic devices. More specifically, the films exhibit a robust ferroelectric (FE) polarization reaching values up to 34 µC/cm² without requiring "wake-up" cycling—a common preparatory requirement in HfO-derived thin films for technological applications.

Experimental Approach and Findings

The study employs pulsed laser deposition (PLD) to grow the HfZrO thin films on (001)-oriented La0.7Sr0.3MnO3 substrates. The films are predominantly (111)-oriented and under epitaxial compressive strain, which is crucial for the stabilization of the newly discovered rhombohedral phase. Structural characterization through X-ray diffraction and transmission electron microscopy provides evidence of the rhombohedral nature, diverging from the traditionally acknowledged polar orthorhombic phase previously attributed to ferroelectricity in hafnia-based systems.

The capacitive properties of the HfZrO films were assessed through PUND measurements, revealing large remanent polarization values. Notably, the polarization values reached 34 µC/cm² in the 5 nm thick films—an unprecedented figure in HfZrO systems. This high polarization is attributed to the compressive epitaxial strain that stabilizes the rhombohedral phase, which potentially ameliorates one of the main integration barriers in device applications, namely the "wake-up" cycling.

Theoretical Perspectives

The paper further contributes to theoretical insights by leveraging first-principles simulations to explore stable structural configurations. The computational analysis identifies two rhombohedral phases (R3 and R3m) within the HfZrO composition, which, although energetically less favorable in bulk, gain stability under epitaxial compression. These findings suggest that epitaxial strain can induce a substantial polarization in rhombohedral-like structures under appropriate conditions, fostering a better understanding of ferroelectric phenomena at the nanoscale.

Implications and Future Directions

The discovery of a rhombohedral FE phase in HfZrO thin films presents vital implications for nanoscale ferroelectric applications. Practically, it opens pathways to creating ferroelectric materials without the need for complex cycling procedures and offers insights into strain-stabilized phases that might be overarching to other simple oxide systems. Theoretically, the study invites further exploration into the rich phase diagrams of HfO2 and ZrO2 systems, potentially revealing novel polar phases via minor dopant variations or under unsymmetrical strain conditions.

Future developments might include the exploration of multiferroic capabilities by integrating these films with compatible electrode materials and exploiting tunable strain mechanisms. The potential for scaling these findings to industrial processes, such as atomic layer deposition, could further catalyze the integration of these materials into scalable, commercial electronics.

In conclusion, this study significantly expands the understanding of ferroelectricity in epitaxially-strained HfZrO films. The revelations regarding the rhombohedral phase and its associated ferroelectric properties contribute to both the fundamental science of ferroics and the practical engineering of next-generation electronic components.

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