Particle dynamics in deposition of porous films with a pulsed radio-frequency atmospheric pressure glow discharge

Abstract: Nanoparticles grown in a plasma are used to visualize the process of film deposition in a pulsed radio-frequency (rf) atmospheric pressure glow discharge. Modulating the plasma makes it possible to successfully prepare porous TiO2 films. We study the trapping of the particles in the sheath during the plasma-on phase and compare it with numerical simulations. During the plasma-off phase, the particles are driven to the substrate by the electric field generated by residual ions, leading to the formation of porous TiO2 film. Using video microscopy, the collective dynamics of particles in the whole process is revealed at the most fundamental "kinetic" level.