Small anode ion source

Abstract: Ion source modification is proposed for efficient production of ion beam and extending of operating Lifetime. Ionization efficiency of the Bernas type ion source has been improved by using a small anode-thin rod, oriented along the magnetic field. The transverse electric field of small anode transport plasma by drift in crossed field to the emission slit. Optimization of the cathode material recycling is used to increase the operating lifetime. Optimization of the wall potential is used for suppression of flakes formation. A three-electrode extraction system was optimized for low energy beam production and efficient space charge neutralization. An ion beam with emission current density up to 60 mA/cm2 has been extracted from discharge in BF3 gas.