Functional surface ion traps on a 12-inch glass wafer for quantum applications

Abstract: We report large-scale fabrication of perfectly functional radio frequency (RF) surface ion traps on a 12-inch glass substrate with a standard CMOS-compatible backend process. Established 12-inch foundry backend process of electroplated Cu with Au finish are employed to fabricate the surface electrodes directly on the glass wafer substrate. We tested a trap by loading it with laser-cooled 88 Sr + ions. The trap shows a stable operation with RF amplitude in the range 100-230 V at 33 MHz frequency. The ion lifetime is on the order of 30 minutes for a pressure in the vacuum chamber of 5 x 10-11 mbar, which demonstrates an exciting potential for future implementation of quantum computing system with a standard foundry process on CMOS compatible and cost-effective platform.