The Simulation, Fabrication Technology and Characteristic Research of Micro-Pressure Sensor with Isosceles Trapezoidal Beam-Membrane

Abstract: A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and four piezoresistors.To investigate how the elastic silicon membrane affects pressure sensitive characteristics, a simulation models based on ANSYS 15.0 software were used to analyze the effect of structural dimension on characteristics of pressure sensor. According to that, the chips of micro-pressure sensors were fabricated by micro-electro-mechanical system (MEMS) technology on a silicon wafer with <100> orientation.The experimental results show that the proposed sensor achieves a better sensitivity of 9.64 mV/kPa and an excellent linearity of 0.09%F.S. in the range of 0~3.0 kPa at room temperature and a supply voltage of 5.0 V,with a super temperature coefficient of sensitivity(TCS) about - 684 ppm/K from 235.15 K to 360.15 K and low pressure measurement less than 3.0 kPa.