LEKID sensitivity for space applications between 80 and 600 GHz

Abstract: We report the design, fabrication and testing of Lumped Element Kinetic Inductance Detectors (LEKID) showing performance in line with the requirements of the next generation space telescopes operating in the spectral range from 80 to 600 GHz. This range is of particular interest for Cosmic Microwave Background (CMB) studies. For this purpose we have designed and fabricated 100-pixel arrays covering five distinct bands. These wafers have been measured via multiplexing, where a full array is read out using a single pair of lines. We adopted a custom cold black-body installed in front of the detectors and regulated at temperatures between 1 K and 20 K. We will describe in the present paper the main design considerations, the fabrication processes, the testing and the data analysis.