Design, Modelling, and Simulation analysis of a Single Axis MEMS-based Capacitive Accelerometer

Abstract: This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the accelerometer was tested for both static and dynamic conditions, and the corresponding static capacitance value was calculated and was found to be C0=0.730455pF, a response time of 95.17{\mu}s, and settling time of 7.261ms and the displacement sensitivity Sd= 3.5362* m/g. It was observed that the sensitivity of the accelerometer depends on its design parameters like beam length, overlap area of comb, sensing mass, and the number of interdigital fingers. A novel capacitive accelerometer has been designed for an operating frequency of 2.1kHz The accelerometer was designed using COMSOL Multiphysics and analyzed using the MATLAB simulator tool. The single proposed axis MEMS-based capacitive accelerometer is suitable for automobile applications such as airbag deployment and navigation.