Pulsed laser deposition of Sb2S3 films for phase-change tunable nanophotonics

Abstract: Non-volatile phase-change materials with large optical contrast are essential for future tunable nanophotonics. Antimony trisulfide (Sb2S3) has recently gained popularity in this field due to its low absorption in the visible spectral region. Although several Sb2S3 deposition techniques have been reported in the literature, none of them was optimized with respect to the lowest possible absorption and largest optical contrast upon the phase change. Here, we present a comprehensive multi-parameter optimization of pulsed laser deposition of Sb2S3 towards this end. We correlate the specific deposition and annealing parameters with the resulting optical properties and propose the combination leading to films with extraordinary qualities ({\Delta}n = 1.2 at 633 nm). Finally, we identify crystal orientations and vibrational modes associated with the largest change in the refractive index and propose them as useful indicators of the Sb2S3 switching contrast.