Perfectly vertical silicon metamaterial grating couplers with large segmentation periods up to 650 nm

Abstract: Perfectly vertical grating couplers leveraging metamaterials can achieve both high coupling efficiency and minimal back reflection. The fabricability of these designs, with segmentations in both the longitudinal and transverse dimensions, hinges on the minimum feature size offered by cutting-edge fabrication technologies. In this work we present both numerical and experimental evidence that high performance devices can be obtained while using large transverse segmentation periods of up to 650 nm, thereby increasing the critical feature sizes. For single-step etched couplers produced on the 220 nm silicon-on-insulator platform, we demonstrate coupling efficiencies of nearly 50% in the C-band and remarkably low back reflections of -22 dB at zero-degree incidence angle. Notably, the duty cycles used in our optimized designs deviate significantly from those predicted by traditional effective medium models, even for small periods. Our findings promise to expand the range of optical properties achievable in metamaterials and offer fresh insights into the fine-tuning of nanophotonic devices.