Improving the long-term stability of new-generation perovskite-based TCO using binary and ternary oxides capping layers

Abstract: We report the impact of capping layers on vanadate based transparent conductive oxides (TCOs) to prolong the thermal stability with a minimal loss of resistivity during heat treatment in ambient environment. In the present study, various protecting layers (amorphous Al2O3, LaAlO3 (LAO), TiO2 grown in base pressure and TiO2 deposited under oxygen partial pressure) are grown in-situ on polycrystalline perovskite SrVO3 (SVO) thin films using Pulsed Laser Deposition (PLD). The results show that amorphous LaAlO3 is the most promising protection layer among the oxide layers, to preserve both electrical and optical properties of perovskite SVO films from natural as well as artificial aging. Our present approach for a capping layer on SVO may address the long-term stability issues of correlated TCOs and would open an opportunity for the future oxide electronics applications.