Electron Energy Loss Spectroscopy of 2D Materials in a Scanning Electron Microscope

Abstract: This work demonstrates electron energy loss spectroscopy of 2D materials in a 1-30 keV electron microscope, observing 100-times stronger electron-matter coupling relative to 125 keV microscopes. We observe that the universal curve relating beam energy to scattering holds for the transition from bulk graphite to graphene, albeit with a scale factor. We calculate that optimal coupling for most 2D materials and optical nanostructures falls in this range, concluding that spectroscopy of such systems will greatly benefit from use of this previously unexplored energy regime.