Interplay of carrier density and mobility in Al-Rich (Al,Ga)N-Channel HEMTs: Impact on high-power device performance potential

Abstract: Despite considerable advancements, high electron mobility transistors (HEMTs) based on gallium nitride (GaN) channels remain largely limited to power applications below 650 V. For higher power demands, the ultra-wide bandgap semiconductor alloy aluminium gallium nitride, (Al,Ga)N, has emerged as a key contender for next-generation HEMTs. In this theoretical study, we show that Al-rich Al$x$Ga${1-x}$N-channel HEMTs (with $x \geq 0.5$) outperform the GaN-channel counterparts at and above room temperature, across all Al compositions, $x$. This contrasts with recent theory reports which suggest that only Al$x$Ga${1-x}$N HEMTs with high Al content ($x \geq 0.85$) offer comparable performance to GaN-channel devices. Unlike previous assumptions of a constant two-dimensional electron gas (2DEG) density across the entire composition range $x$, we show that the 2DEG density is highly sensitive to both the Al content and thickness of the individual layers in a HEMT structure. We demonstrate that the superior performance of Al-rich (Al,Ga)N-channel HEMTs is driven by a competing effect between 2DEG density and electron mobility. This work challenges the assumptions of prior studies, which can result in a significant under or overestimation of the potential of high Al content HEMTs. The insights gained from our work provide a comprehensive understanding of the trade-offs between device and material parameters, thus help to guide the design of future Al-rich ($x = 0.5-1.0$) Al$x$Ga${1-x}$N-channel HEMTs for high-power applications.