Low-loss, fabrication-tolerant, and highly-tunable Sagnac loop reflectors and Fabry-Pérot cavities on thin-film lithium niobate

Abstract: We present low-loss ($<1.5\%$) and power-efficient Mach-Zehnder interferometers (MZIs) on thin-film lithium niobate. To accurately measure low MZI losses, we develop a self-calibrated method using tunable Sagnac loop reflectors (SLRs) to build cavities. Fabry-P\'erot cavities constructed from these fabrication-tolerant SLRs achieve an intrinsic quality factor of $2 \times 10^6$. By implementing thermal isolation trenches, we also demonstrate a $>10\times$ reduction in power consumption for thermo-optic phase shifters, achieving a $\pi$-phase shift ($P_\pi$) with just 2.5 mW. These tunable and efficient components are key for scaling up to complex photonic integrated circuits.