Design and Fabrication Of Multiplexed One-Port SAW Resonators On A Single Chip

Abstract: Shear horizontal surface acoustic wave (SH-SAW) sensors are considered as a viable option for label-free, sensitive, real-time, and cost-effective detection. In this paper, we present the design, the fabrication and the characterization of multiplexed SAW sensors based on a single chip SAW resonator. Operating near the industrial, scientific and medical (ISM) bands, resonators were microfabricated on 42.75{\textdegree} Y (ST) cut Quartz. This substrate was selected due to its traditional association with temperature stability in the design of SAW devices. Parameters like aperture, number of interdigitated electrode (IDT) pairs, IDT wavelengths, and number of reflectors were studied experimentally to enhance electrical responses. Resonance frequency, quality factor and electromechanical coupling were extracted through impedance measurements and fitted with a modified Butterworth-Van Dyke (MBVD) model. Based on these results, we propose a novel design for a multi-frequency device that can serve as a single electronic nose for complex gases detection.