Microwave characterization of superconducting coplanar resonators made out of granular aluminium

Abstract: We have designed, fabricated and characterized microwave resonators made out of thin films of granular aluminium (grAl) with different oxygen content. We extract the contribution of the large kinetic-inductance of this disordered superconductor from the frequency shift of the resonators as a function of temperature, and discuss the correlation with the resistivity of the films. At low temperatures, measurements of the internal quality factor as a function of microwave power indicate the presence of two-level systems, which are inherent to the growth process of the granular aluminium. The characterization methods presented here may be useful for the design of MKIDs, high-impedance resonators and superinductors.