MatQnA: A Benchmark Dataset for Multi-modal Large Language Models in Materials Characterization and Analysis

Abstract: Recently, LLMs have achieved remarkable breakthroughs in general domains such as programming and writing, and have demonstrated strong potential in various scientific research scenarios. However, the capabilities of AI models in the highly specialized field of materials characterization and analysis have not yet been systematically or sufficiently validated. To address this gap, we present MatQnA, the first multi-modal benchmark dataset specifically designed for material characterization techniques. MatQnA includes ten mainstream characterization methods, such as X-ray Photoelectron Spectroscopy (XPS), X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), etc. We employ a hybrid approach combining LLMs with human-in-the-loop validation to construct high-quality question-answer pairs, integrating both multiple-choice and subjective questions. Our preliminary evaluation results show that the most advanced multi-modal AI models (e.g., GPT-4.1, Claude 4, Gemini 2.5, and Doubao Vision Pro 32K) have already achieved nearly 90% accuracy on objective questions in materials data interpretation and analysis tasks, demonstrating strong potential for applications in materials characterization and analysis. The MatQnA dataset is publicly available at https://huggingface.co/datasets/richardhzgg/matQnA.