Patterning perovskite colour converters for AR/VR microdisplays

Abstract: Colour conversion offers the clearest path to achieve RGB colours in high resolution microdisplays for AR/VR. With resolutions beyond 5000 ppi (i.e. RGB pitch of 5 um), the thickness of the conversion layers is critical for efficiency and manufacturing. Perovskites outperform other conversion materials (quantum dots or phosphors) with their high absorption coefficients for blue light. In this contribution, we show how perovskite materials, engineered for high optical density and colour purity, can be patterned to produce colour converting pixels. We demonstrate patterning using three approaches (lift-off, negative photoresist and dry etch), and discuss their advantages and disadvantages. The results consolidate the choice of perovskites for AR/VR applications by demonstrating their robustness and compatibility with multiple patterning strategies suitable for high resolution microdisplays.