Reaction-Diffusion Driven Patterns in Immiscible Alloy Thin Films

Abstract: We demonstrate local microstructural modification of thin films through film-substrate interactions. Metastable single-phase Ag-Cu thin films are deposited on Si substrates pre-patterned by FIB milling. During post-deposition annealing, localized film-substrate reaction around the milled patterns produces a distinct microstructure termed as the halo. It consists of copper silicide and almost pure Ag, while the far-field film forms a random mixture of Cu and Ag-rich domains through phase separation. We show that the extent of the halo can be controlled by varying the temperature and duration of annealing. However, its length scale does not follow the square-root time dependence typical of diffusional growth. We build a semi-analytical kinetic model of halo growth that incorporates species balance, diffusional transport and a modified Stefan condition. Predictions of the model agree well with the experimental findings and the species diffusivity through the film is obtained through an inverse optimization procedure.