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Optimization of light trapping micro-hole structure for high-speed high-efficiency silicon photodiodes
Published 29 Aug 2018 in physics.app-ph | (1810.00943v1)
Abstract: We optimized micro-holes in a thin slab for fast Si photodetectors at wavelength 800-950nm. Lateral modes are shown to be responsible for the effective light trapping. Small disorder and cone hole shapes helped achieve uniform quantum efficiency in a wide wavelength range.
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