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Enhanced quantum efficiency and reduction of reflection for MSM photodetectors with nano-structured surface

Published 29 Aug 2018 in physics.app-ph | (1810.00945v2)

Abstract: The photon trapping nano-structures help to enhance quantum efficiency and reduce reflection for MSM photodetector that allows fast Si photodetectors at wavelength 800-950nm. The nanostructure consist of micro holes reduces reflection and bends normally incident light into the lateral modes in the absorbing layer.

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